The invention

The invention

Direct optical lithography of functional inorganic materials

The invention

Name of invention
Direct optical lithography of functional inorganic materials
Lithographie optique directe de matériaux inorganiques fonctionnels

Invention description

Description
By ligand engineering, we created photosensitive inks from nanomaterials, enabling direct lithography without traditional photoresists. This achieves >3200ppi resolution & <100 nm line-edge roughness, enhancing micro-display manufacturing.

INVENTORS

Nanjing University

Nanjing University
inventor 3701713461_3882


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