The invention
Autonomous nanofabrication wet-processing “DARK LAB of the FUTURE” system
The invention
- Name of invention
- Autonomous nanofabrication wet-processing “DARK LAB of the FUTURE” system
- Système autonome de nanofabrication par voie humide « DARK LAB of the FUTURE »
Invention description
- Description
- System which provides a fully automated wet etching platform for micro-nano devices, reducing chemical use and enhancing compatibility. With a transfer robot and intelligent scheduling, it allows 24/7 unattended operation, improving efficiency and safety.
INVENTORS
THE HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY inventor 3700652870_2972
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