The invention
GINDeX: Grazing-Incidence Non-Destructive X-ray testing system
The invention
- Name of invention
- GINDeX: Grazing-Incidence Non-Destructive X-ray testing system
- GINDeX : UNE DÉTECTION RAPIDE DES DÉFAUTS POUR LES FILMS MINCES POLYCRISTALLINS DE GRANDE SURFACE PAR DIFFUSION RASANTE DES RAYONS X
Invention description
- Description
- A fast, non-destructive apparatus using grazing-incidence X-ray scattering (GIXS) detects defects in large-area polycrystalline thin films, enabling precise quantification and high-resolution mapping to enhance film quality and boost product yields.
INVENTORS
The Chinese University of Hong Kong / Prof. Xinhui LU inventor 3700782879_3018
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